Product Description
Catalogue sheet for 2BE4
Liquid Water ring Vacuum pump
Introducing the 2BE4 Sries China Pumps Liquid Water Ring Vacuum Pump – a top-of-the-line product designed to meet all your vacuum pumping needs. This high-quality vacuum pump is perfect for a wide range of applications, from industrial to commercial use.
With its advanced technology and superior performance, the 2be4 Series China Pumps Liquid Water Ring Vacuum Pump is the ideal choice for those seeking a reliable and efficient vacuum pump. Its powerful motor ensures maximum suction power, while its durable construction guarantees long-lasting performance.
This vacuum pump is designed to handle a variety of liquids and gases, making it a versatile tool for any industry. Its compact size and easy-to-use design make it a popular choice for those seeking a reliable and efficient vacuum pump.
So if you’re looking for a top-quality vacuum pump that can handle all your pumping needs, look no further than the 2be1 202 Series China Pumps Liquid Water Ring Vacuum Pump. With its superior performance and advanced technology, this vacuum pump is sure to exceed your expectations.
Our company is specialized in different kinds of products. We stick to the principle of “quality first, service first, continuous improvement and innovation to meet the customers” for the management and “zero defect, zero complaints” as the quality objective. To perfect our service, we make our products with good quality at the reasonable price.
Main applications
Usable in every branch of industry – meets the highest requirements for vacuum and filtration systems. Suitable for any rough vacuum and the conveyance of almost all process gases.
Features and benefits
- Wear-free and corrosion-resistant
- Robust and low-maintenance
- Easy to inspect
- Variable connections
- Extremely quiet
Performance curves
Performance range
Performance curves for inlet pressures <160 mbar only available for 2BE4 30, 40, 50, 60.
The performance range are based on operating conditions with saturated 100 % relativer air at a temperature of 20 °C (68 °F), operating water at a temperature of Feuchte und 20 °C, 15 °C 15 °C (60 °F), and a discharge pressure of 1013 mbar (29.92 in Hg abs.).
Tolerance + 5 % for inlet pressure ≥ 250 mbar, acc. to PNEUROP. Toleranz + 5 % ≥ 250 mbar, PNEUROP. Calculation of individual performance curves is done acc. to individual
Sound pressure level
Type / Typ 2BE4 … | Surface sound pressure level and sound power level | |
LpA [dB(A)] | LWA [dB(A)] | |
30. / 32. | 75 – 82 | 91 – 98 |
40. / 42. | 77 – 86 | 94 – 103 |
50. / 52. | 72 – 82 | 90 – 100 |
60. / 62. | 76 – 91 | 95 – 110 |
67. / 72. | 76 – 91 | 95 – 110 |
The noise levels are measured on bare machines in accordance with EN ISO 2151 and EN ISO 3746 (not including noise emitted from piping and auxiliary equipment). This corresponds to the normal operational state. Values refer to standard rotational speed, inlet and discharge pressures. Values that are specific to a purchase order are available depending on the scope of the order. Actual noise levels can be higher at working place due to background noise and conditions of installation.
Speeds and Vibrations
Type / Typ 2BE4 … | 30. / 32. | 40. / 42. | 50. / 52. | 60. / 62. | 67. | 72. |
Permissible speed range |
453 – 809 | 294 – 612 | 229 – 477 | 194 – 405 | 179 – 373 | 164 – 341 |
Permissible vibrations (rigid support class) in mm/s, RMS |
< 4.5 | < 4.5 | < 4.5 | < 4.5 | < 4.5 | < 4.5 |
In special cases are excessive vibrations agreed CZPT and permitted. / Measurement according to ISO1571-3.
Materials | |||||
Part |
Teil |
Material of construction – Werkstoffkombination Cast iron Cast iron – Stainless steel combination Stainless steel |
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B | K | E | H | ||
Order No. | Order No. | Order No. | Order No. | ||
Vacuum pump | |||||
Impeller |
Spheroidal graphite cast iron ASTM A 536 Grade 60-40-18 3) |
Spheroidal graphite cast iron coated with ceramic 1) ASTM A 536 Grade 60-40-18 3) |
Stainless steel ASTM A 276 316Ti 3) |
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Shaft |
Carbon steel ASTM A 572 Grade 50 3) Stahl S355J2G3 (St52-3N) / 1.571 3) |
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Shaft bushing |
2BE4: Stainless steel centrifugal casting ASTM 532 III A 25% Cr 3) |
Stainless steel centrifugal casting ASTM A 351 CF-10MC 3) |
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NRP2: Coated shaft in the area of the shaft bushing |
— |
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Port plate 2BE4 3.-2BE4 5. |
Grey cast iron ASTM A 48 Class 30 B 3) |
Stainless steel casting ASTM A 351 CF-10MC 3) |
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Port plate 2BE4 6.-2BE4 7. |
Carbon steel ASTM A 283 Grade C 3) |
Stainless steel ASTM A 276 316L 3) |
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Stahl S235JRG2 (RSt37-2) / 1.0038 3) |
X2CrNiMo17-12-2 / 1.4404 3) |
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Cone |
Grey cast iron ASTM A 48 Class 30 B 3) |
— — — — — |
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Casing without partition wall |
Carbon steel, Polyisoprene (NR)-coated 2) ASTM A 283 Grade C 3) + Polyisoprene (NR) |
Carbon steel, lined with stainless steel ASTM A 283 Grade C 3) + ASTM A 276 316Ti 3) |
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Casing with partition wall |
Carbon steel, Polyisoprene (NR)-coated 2) ASTM A 283 Grade C 3) + Polyisoprene (NR) |
— — |
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(not for 2BE4 30/32) |
Stahl, mit Polyisoprenauskleidung 2) S235JR (St37-2) / 1.0037 3) + Polyisopren (NR) |
— — |
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End shield |
Grey cast iron ASTM A 48 Class 30 B 3) |
Stainless steel casting ASTM A 351 CF-10MC 3) |
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Packings for stuffing box |
2BE4: Cotton impregnated (pH appr. 6-8) NPR2: PTFE, |
Ramie-fibre with PTFE |
An exploded view and further details you can find in our catalogue sheet for 2BE4/NPR2-materials.
- For coating with ceramic valid 2 % decrease in suction capacity and special warranty conditions. Please contact our GD CZPT sales partner. Max. operating temperature 55 °C (131 °F). /
- Max. operating temperature 65 °C (149 °F)
- Or comparable material.
Materials | |||||
Part | Teil | Material of construction | |||
(Order code) | (Kurzangabe) | Cast iron | Cast iron – Stainless steel combination | Stainless steel | |
B | K | E | H | ||
Order No. | Order No. | Order No. | Order No. | ||
Extended scope of supply | |||||
Manifold (F44/F47) |
Hosenrohr (F44/F47) |
for/bei 2BE4 30…32: Grey cast iron ASTM A 48 Class 30 B 1) |
Stainless steel ASTM A276 316Ti 1) |
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Gusseisen mit Lamellengraphit EN-GJL-200/EN-JL1030 (GG-20 / 0.6571) 1) for/bei 2BE4 40…72: Carbon steel ASTM A283 Grade C 1) Stahl S235JRG1+CR / 1.0036 (UST37-2 |
Edelstahl X6CrNiMoTi17-12-2 / 1.4571 1) |
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Separator (F43) |
Abscheider (F43) |
Carbon steel ASTM A283 Grade C 1) |
Stainless steel ASTM A276 316Ti 1) |
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Stahl S235JRG1+CR / 1.0036 (UST37-2) 1) |
Edelstahl X6CrNiMoTi17-12-2 / 1.4571 1) |
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(only for 2BE4) |
(nur bei 2BE4) |
Stahl S235JRG1+CR / 1.0036 (UST37-2) 1) |
Edelstahl X6CrNiMoTi17-12-2 / 1.4571 1) |
1) Or comparable material.
Model numbers and order information | ||||||
Scope of supply |
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(Details on page Cast iron B Order No. |
Material of construction – Cast iron – Stainless steel combinations K E Order No. Order No. Bestell-Nr. Bestell-Nr. |
Stainless steel H Order No. |
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Vacuum pump, basic design | ||||||
Inlet flange N 1.0 at the top, discharge flange N 2.0 at the side. Flanges acc. to DIN EN 1092-2 |
NPR2 |
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Shaft sealing |
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Stuffing box with internal sealant 1) |
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2BE4 …-2BY4 NPR2 …-2BY4 |
2BE4 …-2KY4 — |
2BE4 …-2EY4 — |
— — |
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Stuffing box with external sealant supply |
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2BE4 …-2BY3 NPR2 …-2BY3 |
2BE4 …-2KY3 — |
2BE4 …-2EY3 — |
2BE4 …-2HY3 — |
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Mechanical seal, single acting, with external sealant supply |
Burgmann Crane |
2BE4 …-2BY5 or / oder 2BE4 …-2BY7 |
2BE4 …-2KY5 or / oder 2BE4 …-2KY7 |
2BE4 …-2EY5 or / oder 2BE4 …-2EY7 |
2BE4 …-2HY5 or / oder 2BE4 …-2HY7 |
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NPR2 o.r. / a.A. |
— | — | — | |
Mechanical seal, double acting |
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o.r. / a.A. |
o.r. / a.A. |
o.r. / a.A. |
o.r. / a.A. |
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Casing |
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without partition wall | 2BE4 ..0-…. NPR2 ..0-…. | 2BE4 ..0-…. — |
2BE4 ..0-…. — |
2BE4 ..0-…. — |
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with partition wall 2) |
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2BE4 ..6-…. NPR2 .6-…. |
2BE4 ..6-…. — |
o.r./a.A. — |
o.r./a.A. — |
Footnotes to page 6,7 and 8
- Impregnating stuffing box with automatic lubrication
- Design “with partition wall” for 2BE4 30/32 on request
- Check, if partial drain flange (F68) is necessary (increasing of operation security)
- F23 only for: 2BE4 ..0 -2B.. and 0-2K..; already included in 2BE4 ..0-2E.. and 0-2H..
- Lined with Polyisoprene (F27) is only deliverable with stuffing box with external sealant supply. Max. operating temperature 55 °C (131 °F). Gauge connection N8.7 not available.
- F26: Max. operating temperature 55 °C (131 °F)
Extended scope of supply | ||||||
Scope of supply |
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Material of construction pump (Details on page 4+5 Cast iron Cast iron – Stainless steel Stainless steel combinations |
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B | K | E | H | |||
Order code *) | Order code *) | Order code *) | Order code *) | |||
Inlet flange N 1.0 and discharge flange N 2.01 at the top: – without partial drain flange |
F65 |
F65 |
F65 |
F65 |
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– with partial drain flange acc. to DIN EN 1092-1 Discharge flange N2.01 at the top, with mounted separator 3) Discharge flange N2.01 at the top, with mounted manifold 3) Discharge flange N2.0 lateral, with mounted manifold suction- side |
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F68 F43 F47 F44 |
F68 F43 F47 F44 |
F68 F43 F47 F44 |
F68 F43 F47 F44 |
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Casing lined with stainless steel 4) End shields in grey cast iron lined with Polyisoprene (NR) 5) End shields in grey cast iron with partially ceramic coating (erosion protection) 6) |
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F23 F27 F26 |
F23 F27 F26 |
— F27 F26 |
— — F26 |
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Operating liquid self-priming (operation and test) Flange connection acc. to ANSI B16.5 Increase of operating liquid Second shaft extension for tandem drive Counterclockwise rotation
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F74 F62 F64 F66 F69 K98 F91 |
F74 F62 F64 F66 F69 K98 F91 |
F74 F62 F64 F66 F69 K98 F91 |
F74 F62 F64 F66 F69 K98 F91 |
Footnotes see page 6 /
Further technical data | ||||||||||
Weights • | ||||||||||
Vacuum Pump | Extended scope of supply | |||||||||
w/o. partition wall |
with partition wall |
F23 F43 F44 F47 F66 F68 | K98 | |||||||
Type | appr. / ca. t | Type | appr. / ca. t | appr. / ca. kg | ||||||
NPR2 620 | 15.5 | NPR2 626 | 15.6 | – | – | – | – | – | – | – |
2BE4 720 | 14.2 | 2BE4 726 | 14.3 | 205 | 780 | 610 | 610 | 98 | 5.2 | 98 |
2BE4 670 | 11.4 | 2BE4 676 | 11.5 | 170 | 620 | 520 | 520 | 98 | 5.2 | 98 |
2BE4 620 | 9.1 | 2BE4 626 | 9.2 | 145 | 580 | 450 | 450 | 67 | 5.2 | 67 |
2BE4 600 | 8.2 | 2BE4 606 | 8.3 | 120 | 540 | 410 | 410 | 67 | 5.2 | 67 |
2BE4 520 | 6.0 | 2BE4 526 | 6.0 | 105 | 440 | 280 | 280 | 54 | 5.2 | 54 |
2BE4 500 | 5.5 | 2BE4 506 | 5.5 | 80 | 410 | 260 | 260 | 54 | 5.2 | 54 |
2BE4 420 | 3.4 | 2BE4 426 | 3.4 | 65 | 250 | 200 | 200 | 30 | 5.2 | 30 |
2BE4 400 | 2.9 | 2BE4 406 | 3.0 | 45 | 230 | 180 | 180 | 30 | 5.2 | 30 |
2BE4 320 | 2.0 | — | 40 | 160 | 91 | 91 | 16 | 5.2 | 16 | |
2BE4 300 | 1.6 | — | 30 | 160 | 80 | 80 | 16 | 5.2 | 16 |
Operating liquid rates | ||||||||||||||
Operating liquid rates (water) for various inlet pressures (1 m³/h = 4.4 US gpm) : | ||||||||||||||
Type mbar: 160 180 200 250 300 350 | 400 | 450 | 550 | 600 | 650 | 700 | 800 | |||||||
NPR2 62 | m³/h: | – | – | 43.2 | 43.2 | 43.2 | 43.2 | 43.2 | 43.2 | 22.7 | 22.7 | 22.7 | 22.7 | 22.7 |
2BE4 72 | m³/h: | 40.6 | 41.4 | 41.9 | 42.7 | 42.3 | 41.4 | 39.6 | 37.2 | 34.7 | 31.8 | 28.8 | 23.3 | 19.2 |
2BE4 67 | m³/h: | 33.9 | 34.5 | 35.0 | 35.7 | 35.3 | 34.5 | 33.1 | 31.1 | 29.0 | 26.5 | 24.1 | 19.5 | 16.0 |
2BE4 62 | m³/h: | 28.8 | 29.4 | 29.8 | 30.4 | 30.1 | 29.4 | 28.1 | 26.5 | 24.6 | 22.6 | 20.5 | 16.6 | 13.6 |
2BE4 60 | m³/h: | 23.9 | 24.3 | 24.6 | 25.4 | 25.4 | 24.2 | 23.0 | 21.5 | 20.1 | 18.4 | 16.9 | 13.7 | 10.9 |
2BE4 52 | m³/h: | 20.7 | 21.1 | 21.4 | 21.8 | 21.6 | 21.1 | 20.2 | 19.0 | 17.7 | 16.2 | 14.7 | 11.9 | 9.8 |
2BE4 50 | m³/h: | 17.0 | 17.4 | 17.6 | 18.3 | 18.3 | 17.2 | 16.6 | 15.4 | 14.4 | 13.2 | 12.1 | 9.9 | 7.8 |
2BE4 42 | m³/h: | 11.5 | 12.0 | 12.3 | 12.9 | 13.1 | 12.9 | 12.4 | 11.7 | 10.9 | 9.9 | 8.9 | 7.1 | 5.9 |
2BE4 40 | m³/h: | 9.0 | 9.2 | 9.5 | 9.9 | 9.9 | 9.5 | 9.0 | 8.7 | 7.9 | 7.5 | 6.6 | 5.3 | 4.2 |
2BE4 32 | m³/h: | 7.2 | 7.3 | 7.4 | 7.6 | 7.5 | 7.3 | 7.0 | 6.6 | 6.2 | 5.6 | 5.1 | 4.1 | 3.4 |
2BE4 30 | m³/h: | 5.1 | 5.3 | 5.3 | 5.5 | 5.6 | 5.3 | 5.1 | 4.9 | 4.4 | 4.2 | 3.7 | 3.0 | 2.4 |
Tolerance + 20 %
Accessories | ||||||||
Scope of supply | for type | Material of construction – | Weight | |||||
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Cast iron Cast iron – Stainless steel -Stainless steel combinations
B K, E H |
appr.
kg |
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for 2BE4 | ||||||||
Check valve for N 1.1 incl. mounting set 1) | |
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2BE4 30…32 | 2BY6 920-1BX08 — |
— 2BY6 920-1HX08 |
37 37 |
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2BE4 40…42 | 2BY6 930-1BX08 — |
— 2BY6 930-1HX08 |
56 56 | |||||
2BE4 50…52 | 2BY6 935-1BX08 — |
— 2BY6 935-1HX08 |
107 107 | |||||
2BE4 60…62 | 2BY6 940-1BX08 — |
— 2BY6 940-1HX08 |
134 134 | |||||
2BE4 67…72 | 2BY6 950-1BX08 — |
— 2BY6 950-1HX08 |
o.r./ a.A. |
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Pressure indicator for measuring of inlet pressure for gas or operating liquid (range -1 to +0.6 bar below or above atmos. pressure) |
2BE4 … |
2BX9 012-1HD20 |
1 |
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Foundation blocks (DIN 799-1), incl. machine screws (DIN EN 4017) 1 set = 4 pieces |
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– M30x280, incl. M20x60 | 2BE4 30…32 | 2BX9 008-2 | 28 | |||||
– M36x340, incl. M36x90 | 2BE4 40…52 | 2BX9 003-1 | 50 | |||||
– M42x425, incl. M42x120 |
2BE4 60…72 |
2BX9 004-2 |
86 |
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for NPR2 | ||||||||
on request | NPR2 62 | o.r. / a.A. | — | — | — | |
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1) Attention: reducer needed, take notice of pressure drop.
2BE4includes 2B44 30/32, 2BE440/42, 2BE450/52,2BE460/62, 2BE467/72. They have different connection size. Below lists the size for 2BE4 40/42 for your reference.
2BE4 40./42. -2
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Connec- | suitable for DIN EN 1092-2 (mm) | suitable for ANSI B16.5 150 lbs (inches) | ||||||||||||||
Anschluss | DN | d2 | d4 | D | k | z | R1 | DN | d2 | d4 | D | k | z | |||
N1.0/ 1.01 | Inlet flange | PN10 | 250 | 22 | 320 | 395 | 350 | 12 | — | 10 | 1 | 12 ¾ | 16 | 14 ¼ | 12 | |
N1.1 | Flange manifold | PN10 | 300 | 22 | 370 | 445 | 400 | 12 | — | 12 | 1 | 15 | 19 | 17 | 12 | |
N2.0/ 2.01 | Discharge flange | PN10 | 250 | 22 | 320 | 395 | 350 | 12 | — | 10 | 1 | 12 ¾ | 16 | 14 ¼ | 12 | |
N2.2 | Flange liquid separator | PN10 | 300 | 22 | 370 | 445 | 400 | 12 | — | 12 | 1 | 15 | 19 | 17 | 12 | |
N3.0 | Connection for operating liquid | PN16 | 50 | M16 | 102 | — | 125 | 4 | 2 3/8* | 2 | — | — | — | — | — | |
N3.2 | Connection for sealing liquid to stuffing boxes (external supply only) | Rp ¼ | Rp ¼ | |||||||||||||
N4.0 | Drain liquid separator | PN10 | 150 | 22 | 212 | 285 | 240 | 8 | — | 6 | 7/8 | 8 ½ | 11 | 9 ½ | 8 | |
N4.2 | Flush and drain openings | PN16 | 50 | M16 | 102 | — | 125 | 4 | 2 3/8* | 2 | — | — | — | — | — | |
N4.3 | Connection for leakage liquid | Rp ¾ | Rp ¾ | |||||||||||||
N4.41 | Optional connection for internal liquid supply of the shaft seal | Rp ½ | Rp ½ | |||||||||||||
N4.6 | Screw plugs for total drain | Rp ½ | Rp ½ | |||||||||||||
N8.7 **) | Screw plugs for gauge connection | Rp ½ | Rp ½ |
After-sales Service: | Online Support |
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Warranty: | 12months |
Oil or Not: | Oil Free |
Structure: | Rotary Vacuum Pump |
Exhauster Method: | Positive Displacement Pump |
Vacuum Degree: | Low Vacuum |
Customization: |
Available
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Basic knowledge of vacuum pump
A vacuum pump is a device that draws gas molecules from a sealed volume and maintains a partial vacuum. Its main job is to create a relative vacuum within a given volume or volumes. There are many types of vacuum pumps. This article will describe how they work, their types, and their applications.
How it works
A vacuum pump is a mechanical device that removes gas from a system by applying it to a higher pressure than the surrounding atmosphere. The working principle of the vacuum pump is based on the principle of gas transfer and entrapment. Vacuum pumps can be classified according to their vacuum level and the number of molecules that can be removed per cubic centimeter of space. In medium to high vacuum, viscous flow occurs when gas molecules collide with each other. Increasing the vacuum causes molecular or transitional flow.
A vacuum pump has several components that make it a versatile tool. One of the main components is the motor, which consists of a rotor and a stator. The rotor and stator contain coils that generate a magnetic field when excited. Both parts must be mounted on a base that supports the weight of the pump. There is also an oil drain that circulates oil throughout the system for lubrication and cooling purposes.
Another type of vacuum pump is the liquid ring vacuum pump. It works by positioning the impeller above or below the blades. Liquid ring pumps can also adjust the speed of the impeller. However, if you plan to use this type of pump, it is advisable to consult a specialist.
Vacuum pumps work by moving gas molecules to areas of higher or lower pressure. As the pressure decreases, the removal of the molecules becomes more difficult. Industrial vacuum systems require pumps capable of operating in the 1 to 10-6 Torr range.
Type
There are different types of vacuum pumps. They are used in many different applications, such as laboratories. The main purpose of these pumps is to remove air or gas molecules from the vacuum chamber. Different types of pumps use different techniques to achieve this. Some types of pumps use positive displacement, while others use liquid ring, molecular transfer, and entrapment techniques.
Some of these pumps are used in industrial processes, including making vacuum tubes, CRTs, electric lights, and semiconductor processing. They are also used in motor vehicles to power hydraulic components and aircraft. The gyroscope is usually controlled by these pumps. In some cases, they are also used in medical settings.
How a vacuum pump works depends on the type of gas being pumped. There are three main types: positive displacement, negative displacement, and momentum transfer. Depending on the type of lubrication, these principles can be further divided into different types of pumps. For example, dry vacuum pumps are less sensitive to gases and vapors.
Another type of vacuum pump is called a rotary vane pump. This type of pump has two main components, the rotor and the vacuum chamber. These pumps work by rotating moving parts against the pump casing. The mating surfaces of rotary pumps are designed with very small clearances to prevent fluid leakage to the low pressure side. They are suitable for vacuum applications requiring low pulsation and high continuous flow. However, they are not suitable for use with grinding media.
There are many types of vacuum pumps and it is important to choose the right one for your application. The type of pump depends on the needs and purpose of the system. The larger ones can work continuously, and the smaller ones are more suitable for intermittent use.
Apply
Vacuum pumps are used in a variety of industrial and scientific processes. For example, they are used in the production of vacuum tubes, CRTs, and electric lamps. They are also used in semiconductor processing. Vacuum pumps are also used as mechanical supports for other equipment. For example, there may be multiple vacuum pumps on the engine of a motor vehicle that powers the hydraulic components of an aircraft. In addition, they are often used in fusion research.
The most common type of vacuum pump used in the laboratory is the rotary vane pump. It works by directing airflow through a series of rotating blades in a circular housing. As the blades pass through the casing, they remove gas from the cavity and create a vacuum. Rotary pumps are usually single or double-stage and can handle pressures between 10 and 6 bar. It also has a high pumping speed.
Vacuum pumps are also used to fabricate solar cells on wafers. This involves a range of processes including doping, diffusion, dry etching, plasma-enhanced chemical vapor deposition, and bulk powder generation. These applications depend on the type of vacuum pump used in the process, and the vacuum pump chosen should be designed for the environment.
While there are several types of vacuum pumps available, their basic working principles remain the same. Each has different functions and capacities, depending on the type of vacuum. Generally divided into positive displacement pump, rotary vane pump, liquid ring pump, and molecular delivery pump.
Maintenance
The party responsible for general maintenance and repairs is the Principal Investigator (PI). Agknxs must be followed and approved by the PI and other relevant laboratory personnel. The Agknx provides guidelines for routine maintenance of vacuum pump equipment. Agknxs are not intended to replace detailed routine inspections of vacuum pump equipment, which should be performed by certified/qualified service personnel. If the device fails, the user should contact PI or RP for assistance.
First, check the vacuum pump for any loose parts. Make sure the inlet and outlet pressure gauges are open. When the proper pressure is shown, open the gate valve. Also, check the vacuum pump head and flow. Flow and head should be within the range indicated on the label. Bearing temperature should be within 35°F and maximum temperature should not exceed 80°F. The vacuum pump bushing should be replaced when it is severely worn.
If the vacuum pump has experienced several abnormal operating conditions, a performance test should be performed. Results should be compared to reference values to identify abnormalities. To avoid premature pump failure, a systematic approach to predictive maintenance is essential. This is a relatively new area in the semiconductor industry, but leading semiconductor companies and major vacuum pump suppliers have yet to develop a consistent approach.
A simplified pump-down test method is proposed to evaluate the performance of vacuum pumps. The method includes simulated aeration field tests and four pump performance indicators. Performance metrics are evaluated under gas-loaded, idle, and gas-load-dependent test conditions.
Cost
The total cost of a vacuum pump consists of two main components: the initial investment and ongoing maintenance costs. The latter is the most expensive component, as it consumes about four to five times the initial investment. Therefore, choosing a more energy-efficient model is a good way to reduce the total system cost and payback period.
The initial cost of a vacuum pump is about $786. Oil-lubricated rotary vane pumps are the cheapest, while oil-free rotary vane pumps are slightly more expensive. Non-contact pumps also cost slightly more. The cost of a vacuum pump is not high, but it is a factor that needs careful consideration.
When choosing a vacuum pump, it is important to consider the type of gas being pumped. Some pumps are only suitable for pumping air, while others are designed to pump helium. Oil-free air has a different pumping rate profile than air. Therefore, you need to consider the characteristics of the medium to ensure that the pump meets your requirements. The cost of a vacuum pump can be much higher than the purchase price, as the daily running and maintenance costs can be much higher.
Lubricated vacuum pumps tend to be more durable and less expensive, but they may require more maintenance. Maintenance costs will depend on the type of gas that needs to be pumped. Lighter gases need to be pumped slowly, while heavier gases need to be pumped faster. The maintenance level of a vacuum pump also depends on how often it needs to be lubricated.
Diaphragm vacuum pumps require regular maintenance and oil changes. The oil in the diaphragm pump should be changed every 3000 hours of use. The pump is also resistant to chemicals and corrosion. Therefore, it can be used in acidic and viscous products.
editor by CX 2023-08-29